The air bearing round table, EZ-0675, is fitted with a fixed centrode-free 3-phase synchronous motor and incremental angle transmitter with a resolution of 10,000 strokes.

Its concentricity error is 250 nm radial and 100 nm axial.

The load capacity is 200 N axial and 60 N radial.

It is also available for cleanroom applications up to ISO 14644, Class 1 (EZ-0675-R) or with an iron-core torque motor (EZ-0675-T) with an overturning moment of Tmax: 6.1 Nm.